CHIPS Streamlined Supply
Chain Information Collection Request
New
collection (Request for a new OMB Control Number)
No
Regular
10/18/2023
Requested
Previously Approved
36 Months From Approved
210
0
8,820
0
0
0
The CHIPS Incentives Program
Facilities for Semiconductor Materials and Manufacturing Equipment
Notice of Funding Opportunity (NOFO) seeks applications that will
support investments in the construction, expansion, or
modernization of commercial facilities in the United States for
semiconductor materials and manufacturing equipment for which the
capital investment falls below $300 million. This NOFO seeks
applications in the following categories. Semiconductor Materials
Facilities for the manufacture or production, including growth or
extraction, of materials used to manufacture semiconductors, which
are the chemicals, gases, raw and intermediate materials, and other
consumables used in semiconductor manufacturing. Specific examples
include but are not limited to polysilicon; photoresists and
ancillaries (developers, strippers, litho solvents, and
anti-reflective and hardmask layers); sputtering targets (including
tantalum, titanium, and aluminum); and materials specifically used
in quantum information systems (such as hafnium and niobium).
Semiconductor Manufacturing Equipment Facilities for the physical
production of specialized equipment integral to the manufacturing
of semiconductors and subsystems that enable or are incorporated
into the manufacturing equipment. Specific examples of
semiconductor manufacturing equipment include but are not limited
to deposition equipment, including chemical vapor deposition,
physical vapor deposition, and atomic layer deposition; etching
equipment (wet etch, dry etch); lithography equipment (steppers,
scanners, extreme ultraviolet); wafer slicing equipment, wafer
dicing equipment, and wire bonders; inspection and measuring
equipment, including scanning electron microscopes, atomic force
microscopes, optical inspection systems, and wafer probes; certain
metrology and inspection systems; and ion implantation and
diffusion/oxidation furnaces.
Elizabeth Reinhart 301 975-8707
elizabeth.reinhart@nist.gov
No
On behalf of this Federal agency, I certify that
the collection of information encompassed by this request complies
with 5 CFR 1320.9 and the related provisions of 5 CFR
1320.8(b)(3).
The following is a summary of the topics, regarding
the proposed collection of information, that the certification
covers:
(i) Why the information is being collected;
(ii) Use of information;
(iii) Burden estimate;
(iv) Nature of response (voluntary, required for a
benefit, or mandatory);
(v) Nature and extent of confidentiality; and
(vi) Need to display currently valid OMB control
number;
If you are unable to certify compliance with any of
these provisions, identify the item by leaving the box unchecked
and explain the reason in the Supporting Statement.