NESHAP for Semiconductor
Manufacturing (40 CFR part 63, Subpart BBBBB) (Renewal)
Extension without change of a currently approved collection
No
Regular
05/23/2022
Requested
Previously Approved
36 Months From Approved
05/31/2022
2
2
41
41
550
550
The National Emission Standards for
Hazardous Air Pollutants (NESHAP) for Semiconductor Manufacturing
(40 CFR Part 63, Subpart BBBBB) were proposed on May 8, 2002, and
promulgated on May 22, 2003. These regulations apply to existing
facilities and new facilities that emits or has the potential to
emit, considering controls, in the aggregate, any single hazardous
air pollutants (HAP) at a rate of 10 tons per year (tpy) or more or
any combination of HAP at a rate of 25 tpy or more. New facilities
include those that commenced construction, modification or
reconstruction after the date of proposal. This information is
being collected to assure compliance with 40 CFR Part 63, Subpart
BBBBB. In general, all NESHAP standards require initial
notifications, performance tests, and periodic reports by the
owners/operators of the affected facilities. They are also required
to maintain records of the occurrence and duration of any startup,
shutdown, or malfunction in the operation of an affected facility,
or any period during which the monitoring system is inoperative.
These notifications, reports, and records are essential in
determining compliance, and are required of all affected facilities
subject to NESHAP.
On behalf of this Federal agency, I certify that
the collection of information encompassed by this request complies
with 5 CFR 1320.9 and the related provisions of 5 CFR
1320.8(b)(3).
The following is a summary of the topics, regarding
the proposed collection of information, that the certification
covers:
(i) Why the information is being collected;
(ii) Use of information;
(iii) Burden estimate;
(iv) Nature of response (voluntary, required for a
benefit, or mandatory);
(v) Nature and extent of confidentiality; and
(vi) Need to display currently valid OMB control
number;
If you are unable to certify compliance with any of
these provisions, identify the item by leaving the box unchecked
and explain the reason in the Supporting Statement.